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Tutorial or course material on micro-fabrication. - Introduction to Microfabrication
- Cleanroom Training: Explaining the requirements of clean room
- Thermal Oxidation : Why thermal oxidation, how SiO2 formed , how does silicon Oxidize, Structures of SiO2, Kinetics of Thermal Oxidation, Model of Thermal Oxidation, Growth Rate Regimes, Linear and Parabolic Rate Constant Vs Temperature, Oxidation Graph, Oxidation furnace, Oxidize Thickness Characterization
- Photolithography: Contact Printing, Proxmity Printing, diffraction effect in proximity printing, projection printing, explanation of positive photo-resist, negative photo-resist, photo-resist deposit methods, photoresist contrast ratio, critical modulation transfer function, Resolution enhancement techniques(RET), phase shift mask techniques(PSM), optical proximity correction(OPC),e-beam litho, x-ray lithography, ion-beam lithography.
- Wet-Etching : explanation on etch parameters types of etching process
- Thin film deposition: physical deposition, chemical deposition, physical evaporator, thermal evaporator, deposition rate, crucible heating techniques, evaporation Uniformity, Chemical Vapor Deposition(CVD), what are the various types of CVD processes, CVD growth rate, Acceptance angle.
- Dry-Etching Concepts/techniques
- Diffusion/ion-implantation
- soft lithography and micro-molding
These are some of the topics, which you should be aware to know the concepts behind Chip fabrication techniques. There is lot of materials available http://www2.ece.jhu.edu/faculty/andreou/495/2008/Main.htm please edit the comments column for any good link , which could be useful.
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